Three-Dimensional Device Simulation with Minimos-NT using the Wafer-State-Server

By entner, 20 March, 2014
Diplomarbeit Entner

Here you can download the Diplomarbeit (diploma thesis) entitled "Three-Dimensional Device Simulation with Minimos-NT using the Wafer-State-Server". I wrote it 2003 at the Vienna University of Technology. You can find my PhD thesis here.


The fast growing market for semiconductor devices and the rapid development of new technologies in this segment has lead to the development of numerous simulation tools. They cover both the simulation of the manufacturing process of a device as well as the simulation of its electrical characteristics. All these simulation tools cover different stages in the development of semiconductor devices. So it is obvious that choosing those tools that are best suited for the different development steps and combining them to simulate the whole production flow would yield the best results. However, there is no standard description of simulation data and for reading and writing it from and to a file. To solve this issue the WAFER-STATE-SERVER was developed at the Institute for Microelectronics. It can handle various file formats from different vendors and can be expanded to support new formats with minimal effort. Within this thesis the general-purpose device and circuit simulator MINIMOS-NT was enhanced with the capability of reading and writing data from and to the WAFER-STATE-SERVER. This allows MINIMOS-NT to interact with various other simulators and to incorporate it into the workflow of device development. This work presents the design tools and data models that were necessary for the implementation of the new functionality into MINIMOS-NT and for testing it. Also the issues arising during the work and its solutions are presented. For reference a short introduction to the WAFER-STATE-SERVER is given which is used for reading, manipulating, and writing simulation data. This description should make it easy for beginners to access the WAFER-STATE-SERVER. To demonstrate the functionality of the implementation, several three-dimensional devices are created and simulated.